As the semiconductor industry continues to expand to meet growing demand, the environmental impact of the industry, specifically in fabs, is coming under increased pressure. This presentation will explore a few environmental sustainability performance opportunities for semiconductor manufacturing facilities, including energy and electricity use, heat recovery, water use and reclaim, and emissions abatement systems. This session will provide insight into the complexity and trade-offs in facility decision making to balance environmental sustainability performance with other critical issues and discuss opportunity for standard methods for calculating environmental sustainability performance.
