Vice President, Head of Development & Engineering, EUV Source
ASML
San Diego, CA, United States
Alex Schafgans is Vice President, Head of Development & Engineering at ASML San Diego. Since joining ASML/Cymer in 2011 as a Scientist, Alex has played a pivotal role in advancing EUV Source technology. His work has spanned fundamental research and system-level engineering, contributing significantly to the definition, development, and industrialization of the breakthrough 250W EUV Source for high-volume semiconductor manufacturing. He is a leader within ASML for the adoption of Digital Twin and AI tools to solve various complex process optimization challenges for the EUV Source. He holds BS, MS, and PhD degrees in Physics from the University of California, San Diego.
Tuesday, October 7, 2025
1:00pm - 2:00pm MT