Field Applications Specialist, Process Wet Chemistry Metrohm USA Riverview, Florida, United States
With water availability and quality emerging as bottlenecks in semiconductor manufacturing, reuse is no longer a sustainability initiative but a production imperative. As fabs encounter increasing regulatory pressure, rising operating costs, and ESG expectations, water reclamation has become essential for reducing consumption and enhancing efficiency. Yet, the integrity of the ultrapure system depends on real-time quality validation. If quality falls below standards, the consequences can cascade through production, jeopardizing yield, damaging equipment, and increasing waste. Reliable monitoring ensures that reclaimed water meets stringent standards to safeguard process reliability and long-term operational success.
Online ion chromatography (IC) represents a significant innovation in water quality monitoring for semiconductor manufacturing. It enables continuous, real-time analysis of key anions, cations, and silica at concentrations below 10 parts per trillion (ppt). Detection limits were verified using SEMI C10 (C01000) guidelines for method detection, ensuring performance meets industry standards. Integrated into a closed-loop system, online IC eliminates the risk of external contamination and provides accurate readings that reflect the actual chemistry of the water. This high-resolution data allows immediate corrective action and supports consistent compliance with ultrapure water requirements. The result is a shift from reactive sampling to proactive process control.
This session presents the deployment of an online IC process analyzer across multiple points in the UPW reclaim loop, including final filtration and tank return within a semiconductor facility. Key analytes are continuously measured, including bromide, chloride, fluoride, nitrate, nitrite, phosphate, sulfate, ammonium, calcium, lithium, magnesium, potassium, sodium, and silica. The system delivers stable, reproducible results over extended periods without manual sampling or laboratory preparation, significantly advancing scalable water quality management. The analyzer uses a simplified calibration method that quantifies ppt-level concentrations using higher, easier-to-prepare mixed standards. This method removes the complexity of preparing low-level standards while maintaining precision in the ultra-trace range. Over several months of continuous operation, the system demonstrated high reliability and delivered actionable data that supported yield protection and reduced the need for manual intervention.
Online IC is not just an incremental improvement. It is a foundational technology for fabs advancing toward closed-loop water management and circular manufacturing models. By minimizing water waste, reducing dependence on external lab services, and enabling predictive process control, it delivers measurable gains in both sustainability and operational efficiency. For technology leaders integrating real-time analytics into water reuse strategies, online IC offers a scalable, production-proven solution that elevates water management to meet the performance, reliability, and sustainability demands of modern semiconductor manufacturing.
