Speed, precision, yield, and overall productivity in automated processes are gated by interruptions, downtime, and errors. One of the emerging causes of these problems is electromagnetic interference (EMI). As the number of EMI-generating equipment increases, and as electronics become more sensitive, in part due to advanced device geometry, EMI's impact on productivity grows. As an example, wide bandgap devices used now in motion control generate a much broader spectrum of interference than legacy equipment. Also, interference from high-energy tools spreads EMI pollution across to sensitive equipment. Traditional outdated EMC compliance is no longer enough. Proactive goal-oriented EMI management, from equipment design to installation to maintenance, ensures uninterrupted operation. SEMI Standards provide foundation and specific guidance for management of EMI – SEMI E.176 Standard - outlining EMI requirements for the technology of today and for years to come, coordinated with the guidelines from International Roadmap for Devices and Systems (IRDS). The author leads the Task Force for development of electromagnetic standards at SEMI. Proactive goal-oriented EMI management, from equipment design to installation to maintenance, ensures uninterrupted flow of the process in many aspects of semi manufacturing – both at the front and at the back end. The purpose of the presentation is to bring awareness of EMI to equipment manufacturers, system integrators and semi manufacturers; and offer a path of integrating EMI management into every aspect of semi process, making dealing with EMI a forward-looking effort that ultimately saves money for semi manufacturers.
